NCI maintains a larger-scale (~ 1 m³volume) pre-production coating system (Figure 1) for larger-size parts and a greater quantity of parts per deposition run. With this system, plasma deposition from the magnetron sputtering is lateral and a double rotary fixture enables part rotation. This system is used to perform: 1) multilayer depositions, 2) co-deposition from separate magnetron sources, 3) reactive depositions (e.g., oxides, doped-diamondlike carbon), and 4) nanostructured coating depositions using a unique combined physical and chemical vapor deposition method. A significant enhancement to the pre-production coating system, is a novel method to more efficiency ionize the working gas (i.e., a triode sputter method licensed from Southwest Research Institute, (SwRI)).

Figure 1 NCI Pre-production PVD-CVD System (Left), Internal Rotary Stage (Right)

With this unique technology, thicker (up to ~50m, depending on the material) films can be deposited due to the more efficient etching performed prior to coating deposition, which ensures excellent coating adhesion. An additional benefit of the triode sputter technology is the generation of moderate temperatures (up to ~400C) during deposition, which removes water vapor from the part surfaces (which further ensures good coating adhesion) and also enables coating diffusion and densification.

NanoCoatings, Inc. also has a barrel sputtering system (Figure 2), which utilizes two horizontally-mounted magnetron sources that provide a vertically-directed downward plasma. Internally, a barrel surrounds the horizontally-mounted magnetrons, and oscillation of the barrel enables rotation of cylindrical parts under the plasma. As a result, cylindrical rods, drill-bits, cutting-tools, and balls can be processed with this system.

Figure 2 NCI Barrel Sputtering System (Left) and Internal Magnetrons (Right)

Our third deposition system, a small-scale R&D system, shown in Figure 3, is ideal for deposition of newly-designed materials and to develop processing parameters. With two vertically-mounted magnetron sources that can accommodate 2-2.5 in. diameter targets, only small coupons can be coated. Single component, co-deposited multi-component, multilayered films, and reactively deposited materials can be deposited in this system. The system is equipped with a stepper motor drive that controls part translation/oscillation in front of the deposition plasmas.

NanoCoatings also develops and fabricates all of the specialty fixturing that is required to hold and translate parts in front of the deposition plasmas.

Figure 3 NCI R&D System